A Microfluidic Mixer of High Throughput Fabricated in Glass Using Femtosecond Laser Micromachining Combined with Glass Bonding
Jia Qi, Wenbo Li, Wei Chu, Jianping Yu, Miao Wu, Youting Liang, Difeng Yin, Peng Wang, Zhenhua Wang, Min Wang, Ya Cheng
Abstract
We demonstrate a microfluidic mixer of high mixing efficiency in fused silica substrate using femtosecond laser-induced wet etching and hydroxide-catalysis bonding method. The micromixer has a three-dimensional geometry, enabling efficient mixing based on Baker’s transformation principle. The cross-sectional area of the fabricated micromixer was 0.5 × 0.5 mm2, enabling significantly promotion of the throughput of the micromixer. The performance of the fabricated micromixers was evaluated by mixing up blue and yellow ink solutions with a flow rate as high as 6 mL/min.
Topics & Concepts
MicromixerMicrofluidicsFemtosecondMaterials scienceMixing (physics)Substrate (aquarium)LaserEtching (microfabrication)InkwellOptoelectronicsSurface micromachiningNanotechnologyFabricationComposite materialOpticsLayer (electronics)PhysicsOceanographyPathologyAlternative medicineGeologyQuantum mechanicsMedicineMicrofluidic and Capillary Electrophoresis ApplicationsInnovative Microfluidic and Catalytic Techniques InnovationLaser Material Processing Techniques