Dynamic white-light interferometry via multiwavelength tilt iteration and sliding local least squares
Mingliang Duan, Jianxin Li, Shuxian Bi, Yi Zong, Caiyun Yu, Renhui Guo
Abstract
The growing interest in microprofile measurements for advanced semiconductor manufacturing and electronic glass screens has stimulated the demand for in situ dynamic white-light interferometry (DWLI). However, it is challenging to perform vibration-insensitive measurements because of the broad-spectrum interference. In this Letter, we report a vertical scanning DWLI using multiwavelength tilt iteration and sliding local least squares. Numerical simulations and comparative experiments were conducted to verify the principle and performance of the proposed method. To the best of our knowledge, this is the first time such a DWLI has been proposed to achieve excellent vibration-resistant performance without using complex photoelectric compensation systems.