Litcius/Paper detail

An acoustic pressure-gradient MEMS vector hydrophone system based on piezoelectric micromachined ultrasonic transducer array

Xiangyang Wang, Chongbin Liu, Guoqiang Wu

2024Microelectronics Journal16 citationsDOI

Topics & Concepts

HydrophoneAcousticsMicroelectromechanical systemsPiezoelectricityTransducerUltrasonic sensorPMUTMaterials scienceSound pressurePressure sensorEngineeringPhysicsOptoelectronicsMechanical engineeringUnderwater Acoustics ResearchUltrasonics and Acoustic Wave PropagationSpeech and Audio Processing