Influence of electron energy distribution on fluid models of a low-pressure inductively coupled plasma discharge
Dmitry Levko, Rochan Upadhyay, Laxminarayan L. Raja, Alok Ranjan, Peter L. G. Ventzek
Abstract
The aim of the present paper is to examine the influence of assumption on the electron energy distribution function on the relation between the plasma potential and the electron temperature for both electropositive (argon) and electronegative (chlorine) plasmas. A one-dimensional fluid model is used for simplicity although similar results were obtained using a self-consistent two-dimensional fluid model coupled with the Maxwell's equations for inductively coupled plasmas. We find that for electropositive plasma only a bi-Maxwellian electron energy distribution function provides reasonable results compared to measurements in low-pressure inductively coupled plasmas, namely, the increasing plasma potential for increasing electron temperature. For electronegative plasma, the plasma potential is an increasing function of the electron temperature for all electron distributions considered in the model. However, the scaling factors do not agree with the conventional plasma theory. We explain these results by the deviation of electrons from a Boltzmann distribution, which is due to non-equilibrium and non-local nature of plasma at the low-pressure conditions.