Laser-assisted slow tool servo diamond turning of single-crystal silicon for fabricating micro-lens arrays
Hanheng Du, Dongpo Zhao, Changlin Liu, Huawei Chen, Suet To
Topics & Concepts
Materials scienceDiamond turningLens (geology)SiliconLaserDiamondOptoelectronicsDiamond toolServoOpticsComposite materialMechanical engineeringEngineeringPhysicsAdvanced Surface Polishing TechniquesLaser Material Processing TechniquesAdvanced machining processes and optimization