Effects of polishing media on the surface chemical and micromechanical properties of SiC
Xue Li, Xiongjie Wu, Pengfei Wu, Julong Yuan, Yongwei Zhu
Topics & Concepts
ReaxFFPolishingSilicon carbideIndentationMaterials scienceChemical-mechanical planarizationChemical bondMoleculeNanoindentationHydrogen peroxideHydrogen bondChemical reactionComposite materialChemical engineeringChemistryOrganic chemistryEngineeringAdvanced Surface Polishing TechniquesAdvanced ceramic materials synthesisDiamond and Carbon-based Materials Research