Dual-gate low-voltage transparent electric-double-layer thin-film transistors with a top gate for threshold voltage modulation
Wei Dou, Yuanyuan Tan
Abstract
Dual gate (DG) low-voltage transparent electric-double-layer (EDL) thin-film transistors (TFTs) with microporous-SiO<sub>2</sub> for both top and bottom dielectrics have been fabricated, both dielectrics were deposited by plasma-enhanced chemical vapor deposition (PECVD).
Topics & Concepts
Materials scienceOptoelectronicsThreshold voltageThin-film transistorSubthreshold conductionTransistorGate dielectricVoltageField effectLayer (electronics)Electrical engineeringNanotechnologyEngineeringThin-Film Transistor TechnologiesNanowire Synthesis and ApplicationsDiamond and Carbon-based Materials Research