Thin-film temperature sensor made from particle-filled polymer-derived ceramics pyrolyzed in vacuum
Zaifu Cui, Xin Li, Guochun Chen, Chao Wu, Gonghan He, Zhenyin Hai, Qinnan Chen, Daoheng Sun
Topics & Concepts
Materials scienceThin filmCeramicFabricationComposite materialPyrolysisTemperature measurementPolymerWork (physics)OptoelectronicsNanotechnologyMechanical engineeringChemical engineeringEngineeringPhysicsPathologyMedicineAlternative medicineQuantum mechanicsAdvanced Sensor Technologies ResearchGas Sensing Nanomaterials and SensorsGas Dynamics and Kinetic Theory