Leakage mechanism in ferroelectric Hf0.5Zr0.5O2 epitaxial thin films
Xianlong Cheng, Chao Zhou, Baichen Lin, Zhenni Yang, Shanquan Chen, Kelvin H. L. Zhang, Zuhuang Chen, Zuhuang Chen
Topics & Concepts
FerroelectricityMaterials scienceMicroelectronicsOptoelectronicsThin filmLeakage (economics)EpitaxyHeterojunctionSchottky barrierAnnealing (glass)Schottky diodeNanotechnologyComposite materialDielectricMacroeconomicsDiodeLayer (electronics)EconomicsFerroelectric and Negative Capacitance DevicesMXene and MAX Phase MaterialsElectronic and Structural Properties of Oxides