Beam-membrane MEMS capacitive pressure sensor characterized with segmented comb and lever amplification mechanism
Ruimei Liang, Pinghua Li, Yang Liu, Jiaqi Miao, Jialuo Liao, Xuye Zhuang
Topics & Concepts
LeverMicroelectromechanical systemsCapacitive sensingMechanism (biology)Materials sciencePressure sensorBeam (structure)OptoelectronicsAcousticsStructural engineeringElectrical engineeringMechanical engineeringEngineeringPhysicsQuantum mechanicsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAdvanced Sensor and Energy Harvesting Materials