Effects of picosecond laser ablation and surface modification on the surface/interface characteristics and removal performance of 4H-SiC
Qixian Zhang, Kangsen Li, Xiong Zhang, Rui Gao, Chi Fai Cheung, Chunjin Wang
Topics & Concepts
AblationMaterials sciencePicosecondInterface (matter)Laser ablationSurface (topology)Surface modificationOptoelectronicsLaserOpticsComposite materialAerospace engineeringChemical engineeringEngineeringPhysicsWettingGeometrySessile drop techniqueMathematicsSilicon Carbide Semiconductor TechnologiesDiamond and Carbon-based Materials ResearchSemiconductor materials and devices