On the deformation mechanism and dislocations evolution in monocrystalline silicon under ramp nanoscratching
Zhen Li, Yifan Li, Liangchi Zhang
Topics & Concepts
Monocrystalline siliconMaterials scienceSiliconDislocationDangling bondDeformation (meteorology)Slip (aerodynamics)MachiningComposite materialCrystallographyMetallurgyThermodynamicsChemistryPhysicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchIntegrated Circuits and Semiconductor Failure Analysis