Preparation of titanium nitride/oxynitride nanotube array via ammonia-free PECVD method for enhancing supercapacitor performance
Parastoo Mouchani, Rasoul Sarraf‐Mamoory, Hossein Aghajani
Topics & Concepts
Materials scienceNitridingX-ray photoelectron spectroscopyRaman spectroscopyNitridePlasma-enhanced chemical vapor depositionTinTitanium nitrideTitaniumChemical engineeringAnalytical Chemistry (journal)ElectrodeNanotechnologyChemical vapor depositionMetallurgyChemistryLayer (electronics)OpticsChromatographyPhysicsPhysical chemistryEngineeringSupercapacitor Materials and FabricationMXene and MAX Phase MaterialsElectrospun Nanofibers in Biomedical Applications