A fuzzy hierarchical reinforcement learning based scheduling method for semiconductor wafer manufacturing systems
Junliang Wang, Pengjie Gao, Peng Zheng, Jie Zhang, W.H. Ip
Topics & Concepts
Reinforcement learningSemiconductor device fabricationWaferScheduling (production processes)Computer scienceFuzzy logicScheduleEngineeringIndustrial engineeringReliability engineeringMathematical optimizationArtificial intelligenceMathematicsOperating systemElectrical engineeringScheduling and Optimization AlgorithmsAdvanced Manufacturing and Logistics OptimizationElevator Systems and Control