Litcius/Paper detail

Effect of diamond grain shape on gallium nitride nano-grinding process

Shuai Zhang, Houfu Dai

2023Materials Science in Semiconductor Processing12 citationsDOI

Topics & Concepts

AbrasiveMaterials scienceOctahedronDiamondGrindingGrain sizeMetallurgyCrystallographyCrystal structureChemistryAdvanced Surface Polishing TechniquesMetal and Thin Film MechanicsDiamond and Carbon-based Materials Research