Silicon carbide synthesized by RF magnetron sputtering in the composition of a double layer antireflection coating SiC/MgF2
K. Kh. Nussupov, Н. Б. Бейсенханов, S. Keiinbay, Assanali Sultanov
Topics & Concepts
Materials scienceSilicon carbideSputter depositionMagnesium fluorideAmorphous solidCavity magnetronLayer (electronics)SiliconCoatingOptoelectronicsReflection (computer programming)Refractive indexOpticsThin filmComposite materialSputteringNanotechnologyCrystallographyChemistryPhysicsComputer scienceProgramming languageSilicon Carbide Semiconductor TechnologiesAdvanced ceramic materials synthesisOptical Coatings and Gratings