Analysis of dislocation configurations in SiC crystals through X-ray topography aided by ray tracing simulations
Qianyu Cheng, Zeyu Chen, Shanshan Hu, Yafei Liu, Balaji Raghothamachar, Michael Dudley
Topics & Concepts
Materials scienceSilicon carbideSynchrotronDislocationSemiconductorSiliconRay tracing (physics)X-rayOptoelectronicsWaferOpticsComposite materialPhysicsSilicon Carbide Semiconductor TechnologiesSilicon and Solar Cell TechnologiesIntegrated Circuits and Semiconductor Failure Analysis