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First-principles studies of MoF6 absorption on hydroxylated and non-hydroxylated metal oxide surfaces and implications for atomic layer deposition of MoS2

Matthew Lawson, Elton Graugnard, Lan Li

2020Applied Surface Science13 citationsDOIOpen Access PDF

Topics & Concepts

Atomic layer depositionNucleationChemisorptionOxideChemical vapor depositionDensity functional theoryIonic bondingAdsorptionChemistryMetalInorganic chemistryTransition metalDeposition (geology)Charge densityMaterials sciencePhysical chemistryChemical engineeringComputational chemistryLayer (electronics)NanotechnologyCatalysisOrganic chemistryIonPhysicsBiologyPaleontologyEngineeringSedimentQuantum mechanics2D Materials and ApplicationsMXene and MAX Phase MaterialsAdvanced Photocatalysis Techniques
First-principles studies of MoF6 absorption on hydroxylated and non-hydroxylated metal oxide surfaces and implications for atomic layer deposition of MoS2 | Litcius