Wireless photoelectrochemical mechanical polishing for inert compound semiconductor wafers
Liqing Qiao, Liwei Ou, Kang Shi
Topics & Concepts
PolishingWaferMaterials scienceChemical-mechanical planarizationSemiconductorOptoelectronicsComposite materialAdvanced Surface Polishing TechniquesSemiconductor materials and devicesElectronic and Structural Properties of Oxides