Multilayer heterogeneous dielectric films with simultaneously improved dielectric constant and breakdown strength
Zhiqiang Wu, Yiwen Peng, Qiang Guo, Huihui Zhou, Lei Gong, Zhen‐Guo Liu, Qiuyu Zhang, Yanhui Chen
Topics & Concepts
Materials scienceDielectricComposite materialPermittivityDielectric lossDielectric strengthFerroelectricityMicroelectronicsHigh-κ dielectricFerroelectric polymersPolyimideRelative permittivityLayer (electronics)OptoelectronicsDielectric materials and actuatorsAdvanced Sensor and Energy Harvesting MaterialsFerroelectric and Piezoelectric Materials