Surface roughness evolution law in full-aperture chemical mechanical polishing
Wumao Peng, Liang Jiang, Chaopeng Huang, Yu Chen, Yiming Tian, Yanjun Han, Shaohua Zhang, Linmao Qian
Topics & Concepts
PolishingSurface roughnessMaterials scienceSurface (topology)Surface finishChemical-mechanical planarizationLawComposite materialGeometryMathematicsPolitical scienceAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationLaser Material Processing Techniques