Plasma-induced growth mechanism of surface-state silver oxide in nanoscale for low-temperature bonding technology
Taiyu Wang, Songzhao Gu, Yexing Fang, Donglin Zhang, Xiaochen Xie, Zhibo Qu, Yong Wang, Xiuchen Zhao, Jiaqi Wu, Chin C. Lee, Yongjun Huo
Topics & Concepts
Materials scienceNucleationOxideNanocrystalline materialX-ray photoelectron spectroscopyChemical stateScanning electron microscopeNanotechnologyChemical engineeringNanoindentationSurface roughnessMetallurgyComposite materialChemistryOrganic chemistryEngineeringSemiconductor materials and devices3D IC and TSV technologiesCopper Interconnects and Reliability