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Effect of film thickness and temperature on the resistive switching characteristics of the Pt/HfO2/Al2O3/TiN structure

Yulin Liu, Sha Ouyang, Jie Yang, Minghua Tang, Wei Wang, Gang Li, Zhi Zou, Yifan Liang, Yucheng Li, Yongguang Xiao, Shaoan Yan, Qi Chen, Zheng Li

2020Solid-State Electronics21 citationsDOI

Topics & Concepts

TinX-ray photoelectron spectroscopyMaterials scienceResistive touchscreenAtomic force microscopyDielectricAnalytical Chemistry (journal)OptoelectronicsComposite materialNanotechnologyChemical engineeringElectrical engineeringMetallurgyChemistryEngineeringChromatographyAdvanced Memory and Neural ComputingFerroelectric and Negative Capacitance DevicesSemiconductor materials and devices
Effect of film thickness and temperature on the resistive switching characteristics of the Pt/HfO2/Al2O3/TiN structure | Litcius