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Achievement of Green and Sustainable CVD Through Process, Equipment and Systematic Optimization in Semiconductor Fabrication

Song Yi Baek, Jingyu Park, Taeyoung Koh, Dohyung Kim, Jewoung Woo, Jin‐Woo Jung, Se Jun Park, Changsoo Lee, Chulhwan Choi

2024International Journal of Precision Engineering and Manufacturing-Green Technology11 citationsDOI

Topics & Concepts

FabricationSemiconductor device fabricationSemiconductorProcess (computing)Materials scienceProcess optimizationProcess engineeringNanotechnologyManufacturing engineeringEngineering physicsComputer scienceEngineeringOptoelectronicsChemical engineeringMedicinePathologyWaferOperating systemAlternative medicineSemiconductor materials and devicesAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure Analysis
Achievement of Green and Sustainable CVD Through Process, Equipment and Systematic Optimization in Semiconductor Fabrication | Litcius