Substrate-bias-aided preparation and properties of amorphous gallium oxide films and their deep-ultraviolet photodetectors
Yu Pei, Lingyan Liang, Xiaolong Wang, Kun Wang, Hengbo Zhang, Zhendong Wu, Haijuan Wu, Hongliang Zhang, Junhua Gao, Hongtao Cao
Topics & Concepts
Materials scienceOptoelectronicsSubstrate (aquarium)ResponsivityUltravioletPhotodetectorAmorphous solidSputter depositionThin filmSputteringBiasingGalliumNanotechnologyVoltageMetallurgyPhysicsQuantum mechanicsOceanographyGeologyOrganic chemistryChemistryGa2O3 and related materialsZnO doping and propertiesGaN-based semiconductor devices and materials