Nanometer-resolution white-light scanning interferometry for surface-profiling of hybrid bonding samples for advanced semiconductor packaging
Huy Hoang Chu, Dae Hee Kim, Jun Hyung Park, Sukkyung Kang, Sukkyung Kang, Hyun Min Lee, Hongki Yoo, Seungwoo Kim, Sanha Kim, Youngjin Kim, Sanha Kim, Sanha Kim, Youngjin Kim
Topics & Concepts
NanometreSemiconductorMaterials scienceProfiling (computer programming)White light interferometryWhite lightOptoelectronicsInterferometryNanotechnologyOpticsComposite materialPhysicsComputer scienceOperating systemAdhesion, Friction, and Surface InteractionsAdvanced Surface Polishing TechniquesNanofabrication and Lithography Techniques