Damage kinetics induced by swift heavy ion impacts onto films of different thicknesses
R.A. Rymzhanov, Nikita Medvedev, А. Е. Волков
Topics & Concepts
HillockSwift heavy ionNanoclustersIonMaterials scienceIrradiationElectronKineticsMonte Carlo methodLattice (music)Radiation damageMolecular physicsThin filmAtomic physicsFluenceNanotechnologyComposite materialChemistryPhysicsAcousticsQuantum mechanicsNuclear physicsOrganic chemistryMathematicsStatisticsIon-surface interactions and analysisSemiconductor materials and devicesIntegrated Circuits and Semiconductor Failure Analysis