A low-damage copper removal process by femtosecond laser for integrated circuits
Shuai Wang, Lingfeng Wang, Shizhuo Zhang, Huai Zheng, Chen Zhang, Sheng Liu, Feng Liu, Gary J. Cheng
Topics & Concepts
LaserMaterials scienceFluenceFemtosecondOptoelectronicsSubstrate (aquarium)IrradiationIntegrated circuitOpticsNuclear physicsOceanographyGeologyPhysicsLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure Analysis