Mixed-type wafer defect detection based on multi-branch feature enhanced residual module
Shouhong Chen, Zhentao Huang, Tao Wang, Xingna Hou, Jun Ma
Topics & Concepts
WaferComputer scienceDeep learningConvolution (computer science)Feature (linguistics)Artificial intelligenceResidualSemiconductor device fabricationPattern recognition (psychology)Electronic engineeringMaterials scienceAlgorithmOptoelectronicsArtificial neural networkEngineeringPhilosophyLinguisticsIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography Techniques