The role of plasma technology in barrier coating deposition
Zhongwei Liu, Lizhen Yang, Lijun Sang, Zhengduo Wang, Haibao Zhang, Jiushan Cheng, Jianjun Shi, Qiang Chen
Topics & Concepts
Materials sciencePlasma-enhanced chemical vapor depositionPlasmaAtomic layer depositionPlasma processingNanotechnologyCoatingChemical vapor depositionRemote plasmaPhysical vapor depositionOptoelectronicsDielectric barrier dischargeOLEDLayer (electronics)PhysicsDielectricQuantum mechanicsCopper Interconnects and ReliabilityOrganic Light-Emitting Diodes ResearchSemiconductor materials and devices