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Effects of O2 flux on structure, optical properties and hydrophobicity of highly emissive antireflective HfO2 thin films by magnetron sputtering

Zahoor Ahmad, Cheng Xu, Tauseef Shahid, Mustafa Anwar, Zhenlun Song

2021Vacuum28 citationsDOI

Topics & Concepts

Materials scienceThin filmTransmittanceRefractive indexCrystalliteSubstrate (aquarium)Sputter depositionEmissivitySputteringOpticsOptoelectronicsAnti-reflective coatingSurface roughnessOptical coatingBand gapCavity magnetronComposite materialLayer (electronics)NanotechnologyMetallurgyOceanographyPhysicsGeologySemiconductor materials and devicesZnO doping and propertiesMetal and Thin Film Mechanics
Effects of O2 flux on structure, optical properties and hydrophobicity of highly emissive antireflective HfO2 thin films by magnetron sputtering | Litcius