Lowering the resistivity of aluminum doped zinc oxide thin films by controlling the self-bias during RF magnetron sputtering
Eugen Stamate
Topics & Concepts
Materials scienceSputter depositionThin filmElectrical resistivity and conductivitySubstrate (aquarium)SputteringOptoelectronicsDopingElectrodeCavity magnetronAnalytical Chemistry (journal)NanotechnologyChemistryElectrical engineeringEngineeringGeologyChromatographyPhysical chemistryOceanographyZnO doping and propertiesAnalytical Chemistry and SensorsTransition Metal Oxide Nanomaterials