Photoelectrochemical (PEC) etching of Ga2O3
Badriyah Alhalaili, Ruxandra Vidu, Howard Mao, Olfa Kamoun, M. Saif Islam
Topics & Concepts
Etching (microfabrication)Materials scienceDry etchingOptoelectronicsNanotechnologyOxideReactive-ion etchingNanoscopic scaleBand gapSemiconductorElectrolyteMetallurgyChemistryElectrodeLayer (electronics)Physical chemistryGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques