New chemical pathway for large-area deposition of doped diamond films by linear antenna microwave plasma chemical vapor deposition
Marián Marton, Marián Vojs, Pavol Michniak, Miroslav Behúl, V. Řeháček, Michal Pifko, Štěpán Stehlík, Alexander Kromka
Topics & Concepts
Chemical vapor depositionDiamondBoronMaterials scienceCarbon filmPlasma-enhanced chemical vapor depositionDopingAnalytical Chemistry (journal)Carbon fibersThin filmChemical engineeringNanotechnologyChemistryOptoelectronicsOrganic chemistryComposite numberComposite materialEngineeringDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAnalytical chemistry methods development