Research on a new method for optimizing surface roughness of cavitation abrasive flow polishing monocrystalline silicon
Zhao Jun, Rui Wang, E. Y. Jiang, Shiming Ji
Topics & Concepts
AbrasiveMaterials sciencePolishingSurface roughnessTaguchi methodsWaferCavitationMonocrystalline siliconSurface finishMechanical engineeringComposite materialEngineering drawingSiliconMetallurgyEngineeringOptoelectronicsAcousticsPhysicsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationInjection Molding Process and Properties