Investigation of carrier transport in ZnO and ZnO:Al thin films sputtered at different oxygen conditions
Petr Novák, Lucie Nedvědová, Tomáš Kozák, Petra Šotová, Olga Bláhová, Zdeňek Jansa, Rostislav Medlín, Marie Netrvalová, J. Minář
Topics & Concepts
OxygenElectrical resistivity and conductivityArgonMaterials scienceSputteringAnnealing (glass)Thin filmCrystallinityZincOxideStoichiometrySputter depositionDopingAnalytical Chemistry (journal)Chemical engineeringInorganic chemistryChemistryNanotechnologyMetallurgyOptoelectronicsComposite materialEngineeringChromatographyElectrical engineeringOrganic chemistryZnO doping and propertiesCopper-based nanomaterials and applicationsElectronic and Structural Properties of Oxides