A new process for minimizing residual silicon and carbon of reaction-bonded silicon carbide via chemical vapor deposition
Jisu Lee, Daejong Kim, Dongwook Shin, Hyeon-Geun Lee, Ji Yeon Park, Weon-Ju Kim
Topics & Concepts
Materials scienceChemical vapor infiltrationChemical vapor depositionSiliconSilicon carbideCarbon fibersComposite materialPorosityDeposition (geology)Chemical engineeringPorous siliconCarbide-derived carbonNanotechnologyMetallurgyCarbon nanofiberComposite numberCarbon nanotubePaleontologyBiologyEngineeringSedimentAdvanced ceramic materials synthesisAdvanced materials and compositesDiamond and Carbon-based Materials Research