Hyperdoping of silicon films with titanium via nanosecond-laser melting: Structure evolution, impurity distribution, sub-bandgap formation, and doping mechanism
C. Wen, Zhenqi Shi, J.X. Wang, Jiajie Tang, Y.B. Zhang, Yuping Jiang, Y.J. Ma, X.H. Li, Wenjie Yang
Topics & Concepts
Materials scienceBand gapImpurityOptoelectronicsAmorphous solidDopingFluenceThin filmCrystallinityNanocrystalline materialNanosecondSiliconLaserAnalytical Chemistry (journal)OpticsNanotechnologyComposite materialCrystallographyOrganic chemistryChemistryChromatographyPhysicsThin-Film Transistor TechnologiesSilicon Nanostructures and PhotoluminescenceLaser Material Processing Techniques