Crystallographic structure and ferroelectricity of epitaxial hafnium oxide thin films
Shin Kyu Lee, Chung Wung Bark
Topics & Concepts
Materials scienceFerroelectricityEpitaxyThin filmOptoelectronicsSiliconDielectricCrystallinityNanotechnologyLayer (electronics)Composite materialFerroelectric and Negative Capacitance DevicesSemiconductor materials and devicesElectronic and Structural Properties of Oxides