Utilizing mechanical micro-lever coupling structure to enhance sensitivity in mode-localized MEMS accelerometer
Zheng Wang, Xingyin Xiong, KunFeng Wang, Wuhao Yang, Bowen Wang, ZhiTian Li, Xudong Zou
Topics & Concepts
ResonatorFinite element methodAccelerometerMaterials scienceCoupling coefficient of resonatorsLeverSensitivity (control systems)Microelectromechanical systemsCoupling (piping)AcousticsElectronic engineeringOptoelectronicsEngineeringPhysicsStructural engineeringMechanical engineeringQuantum mechanicsMetallurgyAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies