Ultrasensitive Thin-Film Pressure Sensors with a Broad Dynamic Response Range and Excellent Versatility Toward Pressure, Vibration, Bending, and Temperature
Ke Tian, Guopeng Sui, Pei Yang, Hua Deng, Qiang Fu
Abstract
in the pressure ranges of 1 Pa to 20 kPa and 20-500 kPa, respectively), fast signal response (<50 ms), low detection limit (1 Pa), and high stability over 500 loading/unloading cycles. These characteristics allow the devices to work as e-skins to monitor human pulse signals and finger touch. Moreover, these sensors illustrate precise electrical response to mechanical vibration, bending, and temperature stimuli, which afford the ability of detecting cell phone call-in vibration signals, joint bending, spatial pressure, and temperature distributions, indicating promising applications in next-generation wearable, multifunctional e-skins.
Topics & Concepts
Materials scienceBendingVibrationPressure sensorThin filmComposite materialPressure sensitiveDynamic pressureRange (aeronautics)AcousticsNanotechnologyMechanical engineeringMechanicsAdhesiveEngineeringLayer (electronics)PhysicsAdvanced Sensor and Energy Harvesting MaterialsGas Sensing Nanomaterials and SensorsTactile and Sensory Interactions