Litcius/Paper detail

Direct Copper Interconnection for Advanced Semiconductor Technology

Dongkai Shangguan

20249 citationsDOI

Topics & Concepts

InterconnectionSemiconductorCopperMaterials scienceOptoelectronicsEngineeringMetallurgyTelecommunicationsCopper Interconnects and Reliability3D IC and TSV technologiesSemiconductor materials and devices