Optical and electrical properties of Al-doped ZnO thin films by atomic layer deposition
Yongjun Wu, Fa Cao, Xiaohong Ji
Topics & Concepts
Materials scienceElectrical resistivity and conductivityThin filmDopingSubstrate (aquarium)Atomic layer depositionLayer (electronics)Deposition (geology)TransmittanceTransparent conducting filmAnalytical Chemistry (journal)OptoelectronicsComposite materialNanotechnologyOrganic chemistryChemistryBiologyGeologyPaleontologyEngineeringOceanographySedimentElectrical engineeringZnO doping and propertiesCopper-based nanomaterials and applicationsGas Sensing Nanomaterials and Sensors