Effect of dehydrogenation on optical constants of silicon nitride thin films
G. Lavareda, Y. Vygranenko, A. Amaral, P. Brogueira
Topics & Concepts
Materials scienceThin filmAnnealing (glass)Analytical Chemistry (journal)Amorphous solidTransmittanceSilicon nitrideRefractive indexBand gapMolar absorptivitySiliconOpticsOptoelectronicsChemistryCrystallographyNanotechnologyComposite materialChromatographyPhysicsThin-Film Transistor TechnologiesSilicon Nanostructures and Photoluminescence