Litcius/Paper detail

Development of a New Finishing Process Combining a Fixed Abrasive Polishing with Magnetic Abrasive Finishing Process

Yanhua Zou, Ryunosuke Satou, Yamazaki Ozora, Huijun Xie

2021Machines20 citationsDOIOpen Access PDF

Abstract

High quality, highly efficient finishing processes are required for finishing difficult-to-machine materials. Magnetic abrasive finishing (MAF) process is a finishing method that can obtain a high accuracy surface using fine magnetic particles and abrasive particles, but has poor finishing efficiency. On the contrary, fixed abrasive polishing (FAP) is a polishing process can obtain high material removal efficiency but often cannot provide a high-quality surface at the nano-scale. Therefore, this work proposes a new finishing process, which combines the magnetic abrasive finishing process and the fixed abrasive polishing process (MAF-FAP). To verify the proposed methodology, a finishing device was developed and finishing experiments on alumina ceramic plates were performed. Furthermore, the mechanism of the MAF-FAP process was investigated. In addition, the influence of process parameters on finishing characteristics is discussed. According to the experimental results, this process can achieve high-efficiency finishing of brittle hard materials (alumina ceramics) and can obtain nano-scale surfaces. The surface roughness of the alumina ceramic plate is improved from 202.11 nm Ra to 3.67 nm Ra within 30 min.

Topics & Concepts

PolishingAbrasiveMaterials scienceSurface finishingCeramicSurface roughnessAbrasive machiningProcess (computing)Chemical-mechanical planarizationBrittlenessSurface finishMetallurgyComposite materialComputer scienceOperating systemAdvanced Surface Polishing TechniquesAdvanced Machining and Optimization TechniquesIntegrated Circuits and Semiconductor Failure Analysis