Hollow polydimethylsiloxane (PDMS) foam with a 3D interconnected network for highly sensitive capacitive pressure sensors
Dong‐Hwan Kim, Young Jung, Kyungkuk Jung, Dong Hwa Kwak, Dong Min Park, Myung Gyu Shin, Hyeong Jun Tak, Jong Soo Ko
Abstract
Abstract We propose a highly sensitive capacitive pressure sensor made of hollow polydimethylsiloxane (PDMS) foam with a three-dimensional network structure. The stiffness of the foam is adjusted by the viscosity of the PDMS solution. The fabricated PDMS-30 (PDMS 30 wt%) foam shows extremely high porosity (> 86%) approximately 19 times that of bare PDMS (PDMS 100 wt%) foam. Capacitive pressure sensors fabricated using the foam possess high sensitivity, good compressibility (up to 80% strain), and consistent output characteristics in a 2000-cycle test.
Topics & Concepts
PolydimethylsiloxaneMaterials scienceCapacitive sensingComposite materialPorosityPressure sensorStiffnessViscosityCapacitanceCompressibilityElectrodeElectrical engineeringMechanical engineeringPhysical chemistryAerospace engineeringEngineeringChemistryAdvanced Sensor and Energy Harvesting MaterialsTactile and Sensory InteractionsGas Sensing Nanomaterials and Sensors