Atmospheric atomic layer deposition of SnO<sub>2</sub> thin films with tin(<scp>ii</scp>) acetylacetonate and water
Việt Hương Nguyễn, Masoud Akbari, Abderrahime Sekkat, Huong T. T. Ta, João Resende, Carmen Jiménez, Kevin P. Musselman, David Muñoz‐Rojas
Abstract
Our work presents a new process for the spatial atomic layer deposition (SALD) of SnO 2 thin films from tin( ii ) acetylacetonate and water, supported by a DFT study of different Sn metalorganic precursors.
Topics & Concepts
TinAtomic layer depositionThin filmX-ray photoelectron spectroscopyMaterials scienceAmorphous solidDeposition (geology)Layer (electronics)Chemical engineeringTin dioxideNanotechnologyAnalytical Chemistry (journal)Inorganic chemistryChemistryMetallurgyOrganic chemistryEngineeringPaleontologyBiologySedimentSemiconductor materials and devicesZnO doping and propertiesGas Sensing Nanomaterials and Sensors