Cu3N thin film synthesized by selective in situ substrate heating during high power impulse magnetron sputtering for augmenting UV photodetection
Shikha Sakalley, Adhimoorthy Saravanan, Wei-Chun Cheng, Sheng‐Chi Chen, Hui Sun, Ming-Han Liao, Bohr‐Ran Huang
Topics & Concepts
Materials scienceCrystallinityCrystalliteOptoelectronicsThin filmPhotodetectorSputter depositionPhotodetectionHigh-power impulse magnetron sputteringSubstrate (aquarium)SputteringAmorphous solidNanotechnologyComposite materialChemistryMetallurgyGeologyOrganic chemistryOceanographyZnO doping and propertiesCopper-based nanomaterials and applicationsGa2O3 and related materials