Effect of film growth thickness on the refractive index and crystallization of HfO2 film
Jianping Hu, Jian Wang, Yaowei Wei, Qian Wu, Fei Zhang, Qiao Xu
Topics & Concepts
Materials scienceRefractive indexCrystalliteMicrostructureCrystallinityEllipsometryCrystallizationAmorphous solidThin filmElectron beam physical vapor depositionOpticsScanning electron microscopeGrain sizeAnalytical Chemistry (journal)Composite materialCrystallographyOptoelectronicsNanotechnologyChemical engineeringMetallurgyChemistryPhysicsEngineeringChromatographySemiconductor materials and devicesIntegrated Circuits and Semiconductor Failure AnalysisZnO doping and properties