Superhard Ta–O–N coatings produced on titanium using induction physical vapor deposition
Vladimir Koshuro, Marina Fomina, Andrey M. Zakharevich, Aleksandr Fomin
Topics & Concepts
TantalumMaterials scienceTitaniumTantalum nitrideEvaporationMetallurgyPhysical vapor depositionNitrideTitanium nitrideVacuum evaporationAnalytical Chemistry (journal)Layer (electronics)Composite materialThin filmNanotechnologyChemistryPhysicsChromatographyThermodynamicsMetal and Thin Film MechanicsAdvanced materials and compositesDiamond and Carbon-based Materials Research